DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION

dc.contributor.author	Liang, Boshen
dc.contributor.author	Paquet, Louis
dc.contributor.author	Jeong, Yongbin
dc.contributor.author	Heremans, Paul
dc.contributor.author	Cheyns, David
dc.contributor.imecauthor	Liang, Boshen
dc.contributor.imecauthor	Paquet, Louis
dc.contributor.imecauthor	Jeong, Yongbin
dc.contributor.imecauthor	Heremans, Paul
dc.contributor.imecauthor	Cheyns, David
dc.contributor.orcidimec	Liang, Boshen::0000-0003-3299-9034
dc.contributor.orcidimec	Heremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimec	Cheyns, David::0000-0002-1327-8752
dc.date.accessioned	2022-03-14T10:57:13Z
dc.date.available	2022-03-14T10:57:13Z
dc.date.issued	2021
dc.identifier.doi	10.1109/NEMS51815.2021.9451478
dc.identifier.eisbn	978-0-7381-2429-2
dc.identifier.issn	2474-3747
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/39429
dc.publisher	IEEE
dc.source.beginpage	1423
dc.source.conference	16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS)
dc.source.conferencedate	APR 25-29, 2021
dc.source.conferencelocation	Xiamen
dc.source.endpage	1426
dc.source.journal	na
dc.source.numberofpages	4
dc.subject.keywords	ELEMENTS
dc.title	DESIGN AND FABRICATION OF INTEGRATED PIEZOELECTRIC MICROPUMP WITH VORTEX ENHANCEMENT OPTIMIZATION
dc.type	Proceedings paper
dspace.entity.type	Publication
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