Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation
Publication:
Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation
Copy permalink
Date
1997
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
1680.pdf
1.21 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Badenes, Gonçal
;
Rooyackers, Rita
;
Deferm, Ludo
Journal
Abstract
Description
Metrics
Downloads
1
since deposited on 2021-09-30
Acq. date: 2025-12-16
Views
1878
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-16
Citations
Metrics
Downloads
1
since deposited on 2021-09-30
Acq. date: 2025-12-16
Views
1878
since deposited on 2021-09-30
1
last month
Acq. date: 2025-12-16
Citations