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Polysilicon encapsulated LOCOS: a technique for deep submicron lateral isolation

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1 since deposited on 2021-09-30
Acq. date: 2025-12-16

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1878 since deposited on 2021-09-30
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Acq. date: 2025-12-16

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1 since deposited on 2021-09-30
Acq. date: 2025-12-16

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1878 since deposited on 2021-09-30
1last month
Acq. date: 2025-12-16

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