Publication:

Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics

Date

2021
Journal article
https://doi.org/10.1038/s41566-021-00776-0
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dc.contributor.authorWesterveld, Wouter
dc.contributor.authorMahmud Ul Hasan, Hasan MD
dc.contributor.authorShnaiderman, Rami
dc.contributor.authorNtziachristos, Vasilis
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSeveri, Simone
dc.contributor.authorRochus, Veronique
dc.contributor.imecauthorWesterveld, Wouter
dc.contributor.imecauthorMahmud Ul Hasan, Hasan MD
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecWesterveld, Wouter J.::0000-0001-5658-2394
dc.contributor.orcidimecRottenberg, Xavier::0000-0003-0920-1709
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.date.accessioned2022-11-03T15:00:31Z
dc.date.available2021-11-02T16:03:35Z
dc.date.available2022-11-03T15:00:31Z
dc.date.issued2021
dc.identifier.doi10.1038/s41566-021-00776-0
dc.identifier.issn1749-4885
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38068
dc.publisherNATURE RESEARCH
dc.source.beginpage341
dc.source.endpageU13
dc.source.issue5
dc.source.journalNATURE PHOTONICS
dc.source.numberofpages7
dc.source.volume15
dc.subject.keywordsRESONATOR
dc.subject.keywordsDETECTOR
dc.title

Sensitive, small, broadband and scalable optomechanical ultrasound sensor in silicon photonics

dc.typeJournal article
dspace.entity.typePublication
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