Publication:

Transfer of line edge roughness during gate patterning processes

Date

2004
Proceedings Paper
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dc.contributor.authorLeunissen, Peter
dc.contributor.authorErcken, Monique
dc.contributor.authorRonse, Kurt
dc.contributor.authorDerksen, Giljam B.
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-15T14:25:40Z
dc.date.available2021-10-15T14:25:40Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9193
dc.source.beginpage1
dc.source.conferenceProceedings 26th International Symposium on Dry Process
dc.source.conferencedate30/11/2004
dc.source.conferencelocationTokyo Japan
dc.source.endpage6
dc.title

Transfer of line edge roughness during gate patterning processes

dc.typeProceedings paper
dspace.entity.typePublication
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