Publication:
From photon emission microscopy to Raman spectroscopy: failure analysis in microelectronics
Date
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Rasras, Mahmoud | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-15T13:08:19Z | |
| dc.date.available | 2021-10-15T13:08:19Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8805 | |
| dc.source.beginpage | 59 | |
| dc.source.endpage | 65 | |
| dc.source.journal | Eur. Phys. J. Appl. Phys. | |
| dc.source.volume | 27 | |
| dc.title | From photon emission microscopy to Raman spectroscopy: failure analysis in microelectronics | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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