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Influence of hydrogen gas on the synthesis and properties of hexagonal boron nitride nanowalls prepared by unbalanced RF magnetron sputtering

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dc.contributor.authorBenMoussa, B.
dc.contributor.authorBorschel, C.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorBarjon, J.
dc.contributor.authorSaitner, M.
dc.contributor.authorSoltani, A.
dc.contributor.authorMortet, V.
dc.contributor.authorRonning, C.
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorBoyen, H.G.
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2021-10-19T12:33:28Z
dc.date.available2021-10-19T12:33:28Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18552
dc.source.conferenceMRS Spring Meeting Symposium S: Plasma-Assisted Materials Processing and Synthesis
dc.source.conferencedate25/04/2011
dc.source.conferencelocationSan Francisco, CA USA
dc.title

Influence of hydrogen gas on the synthesis and properties of hexagonal boron nitride nanowalls prepared by unbalanced RF magnetron sputtering

dc.typeOral presentation
dspace.entity.typePublication
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