Publication:

Demonstration of an N7 integrated fab process for metal oxide EUV photoresist

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

34342.pdf 1.59 MB

Author(s)

De Simone, Danilo  
;
Mao, Ming  
;
Kocsis, Michael  
;
De Schepper, Peter  
;
Lazzarino, Frederic  
;
Vandenberghe, Geert  
;
Yamashita, Fumiko
;
Stowers, Jason
;
Meyers, Steven
;
Grenville, Andrew
;
Luong, Vinh
;
Parnell, Doni
;
Clark, Benjamin L.

Journal

Abstract

Description

Statistics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2026-01-25

Views

2101 since deposited on 2021-10-23
1last month
Acq. date: 2026-01-25

Citations

Statistics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2026-01-25

Views

2101 since deposited on 2021-10-23
1last month
Acq. date: 2026-01-25

Citations