Publication:

EDA solutions to new-defect detection in advanced process technologies

Date

2012

Proceedings Paper

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Author(s)

Marinissen, Erik Jan

;

Vandling, Gilbert

;

;

Hapke, Friedrich

;

;

Mittermaier, Nikolaus

;

Metrics

1904 since deposited on 2021-10-20

Acq. date: 2025-12-14