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Growth and stability of Pt germanides on Ge and GeSn substrates

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dc.contributor.authorMagchiels, G.
dc.contributor.authorDeduytsche, D.
dc.contributor.authorKotsedi, L.
dc.contributor.authorLoo, Roger
dc.contributor.authorMtshali, C. B.
dc.contributor.authorSegola, I. K.
dc.contributor.authorSpettel, N.
dc.contributor.authorvan Stiphout, K.
dc.contributor.authorVohra, Anurag
dc.contributor.authorDetavernier, C.
dc.contributor.authorVantomme, A.
dc.date.accessioned2026-02-12T14:32:54Z
dc.date.available2026-02-12T14:32:54Z
dc.date.createdwos2025-10-13
dc.date.issued2025-10-01
dc.description.abstractIn the pursuit of high-quality contact materials for (opto)electronic devices, replacing Ni with Pt is explored to offer a path towards more stable (stano)germanide contacts. In this study, we resolve the complex sequence of Pt (stano)germanide phase formation through real-time probing of the elemental redistribution using Rutherford backscattering spectrometry, complemented with X-ray diffraction, and the use of artificial neural networks. The existence of the Pt(Ge(Sn)) phase is confirmed, forming simultaneously with PtGe(Sn). Both Pt/Ge and Pt/GeSn systems follow the same phase sequence; however, the Pt/Ge system exhibits superior thermal stability of the monogermanide and the Ge-rich phases throughout an extended temperature range, as well as better morphological stability up to 600 °C, attributed to nucleation-controlled growth of the Ge-rich phases. The metastable incorporation of 7.5% Sn in Ge modifies the thermodynamic and kinetic behavior of Pt stanogermanide formation, as observed by the reduced compositional and morphological stability at elevated temperatures.
dc.identifier.doi10.1016/j.actamat.2025.121580
dc.identifier.issn1359-6454
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/58785
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpage121580
dc.source.issue1 December
dc.source.journalACTA MATERIALIA
dc.source.numberofpages10
dc.source.volume301
dc.subject.keywordsPHASE-FORMATION
dc.subject.keywordsPLATINUM
dc.subject.keywordsBEHAVIOR
dc.subject.keywordsNICKEL
dc.subject.keywordsFILMS
dc.subject.keywordsNISI
dc.title

Growth and stability of Pt germanides on Ge and GeSn substrates

dc.typeJournal article
dspace.entity.typePublication
imec.identified.statusLibrary
imec.internal.crawledAt2025-10-22
imec.internal.sourcecrawler
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