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Work function engineering by FUSI and its impact on the performance and reliability of oxynitride and Hf-silicate based MOSFETs
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2003 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-16
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Metrics
Views
2003 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-16
Citations