Publication:

The analysis of ultra-thin films with HRBS-30

Date

2009
Meeting abstract
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dc.contributor.authorBrijs, Bert
dc.contributor.authorKimura, K.
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-17T21:28:19Z
dc.date.available2021-10-17T21:28:19Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15042
dc.source.conference5th International Workshop on High-Resolution Depth Profiling
dc.source.conferencedate15/11/2009
dc.source.conferencelocationKyoto Japan
dc.title

The analysis of ultra-thin films with HRBS-30

dc.typeMeeting abstract
dspace.entity.typePublication
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