Publication:
Fluorocarbon-based passivation in STI plasma etching
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1968 since deposited on 2021-10-20
4last month
Acq. date: 2025-12-16
Citations
Metrics
Views
1968 since deposited on 2021-10-20
4last month
Acq. date: 2025-12-16
Citations