Publication:
Controlling CoSi2 nucleation: the effect of entropy of mixing
Date
| dc.contributor.author | Detavernier, C. | |
| dc.contributor.author | Van Meirhaeghe, R. L. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Cardon, F. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T16:51:11Z | |
| dc.date.available | 2021-10-14T16:51:11Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5250 | |
| dc.source.beginpage | C7.9.1 | |
| dc.source.conference | Gate Stack and Silicide Issues in Silicon Processing | |
| dc.source.conferencedate | 24/04/2000 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.source.endpage | C7.9.6 | |
| dc.title | Controlling CoSi2 nucleation: the effect of entropy of mixing | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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