Publication:

Experimental and physics-based modeling assessment of strain induced mobility enhancement in FinFETs

Date

2009
Proceedings Paper
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dc.contributor.authorSerra, N.
dc.contributor.authorConzatti, F.
dc.contributor.authorEsseni, D.
dc.contributor.authorDe Michielis, M.
dc.contributor.authorPalestri, P.
dc.contributor.authorSelmi, L.
dc.contributor.authorThomas, S.
dc.contributor.authorWhall, T. E.
dc.contributor.authorParker, E. H. C.
dc.contributor.authorLeadley, D. R.
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorHytch, M. J.
dc.contributor.authorHoudellier, F.
dc.contributor.authorSnoeck, E.
dc.contributor.authorWang, T. J.
dc.contributor.authorLee, W. C.
dc.contributor.authorVellianitis, Georgios
dc.contributor.authorVan Dal, Mark
dc.contributor.authorDuriez, Blandine
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorVellianitis, Georgios
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorDuriez, Blandine
dc.contributor.imecauthorDoornbos, Gerben
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.date.accessioned2021-10-18T02:54:19Z
dc.date.available2021-10-18T02:54:19Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16202
dc.source.beginpage71
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate7/12/2009
dc.source.conferencelocationBaltimore, MD USA
dc.source.endpage74
dc.title

Experimental and physics-based modeling assessment of strain induced mobility enhancement in FinFETs

dc.typeProceedings paper
dspace.entity.typePublication
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