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Preface: Advances in semiconductor materials, technology, and applications

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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-3513-6058
cris.virtualsource.department2d7dd015-fa43-4fbb-89fc-68f144075506
cris.virtualsource.orcid2d7dd015-fa43-4fbb-89fc-68f144075506
dc.contributor.authorIsella, Giovanni
dc.contributor.authorVirgilio, Michele
dc.contributor.authorLoo, Roger
dc.contributor.authorNakatsuka, Osamu
dc.contributor.authorCapellini, Giovanni
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2024-08-21T19:54:46Z
dc.date.available2024-08-21T19:54:46Z
dc.date.issued2024-NOV 1
dc.identifier.doi10.1016/j.mssp.2024.108700
dc.identifier.issn1369-8001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44350
dc.publisherELSEVIER SCI LTD
dc.source.beginpage108700
dc.source.journalMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
dc.source.numberofpages1
dc.source.volume182
dc.title

Preface: Advances in semiconductor materials, technology, and applications

dc.typeEditorial material
dspace.entity.typePublication
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