Publication:
Preface: Advances in semiconductor materials, technology, and applications
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0003-3513-6058 | |
| cris.virtualsource.department | 2d7dd015-fa43-4fbb-89fc-68f144075506 | |
| cris.virtualsource.orcid | 2d7dd015-fa43-4fbb-89fc-68f144075506 | |
| dc.contributor.author | Isella, Giovanni | |
| dc.contributor.author | Virgilio, Michele | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Nakatsuka, Osamu | |
| dc.contributor.author | Capellini, Giovanni | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2024-08-21T19:54:46Z | |
| dc.date.available | 2024-08-21T19:54:46Z | |
| dc.date.issued | 2024-NOV 1 | |
| dc.identifier.doi | 10.1016/j.mssp.2024.108700 | |
| dc.identifier.issn | 1369-8001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44350 | |
| dc.publisher | ELSEVIER SCI LTD | |
| dc.source.beginpage | 108700 | |
| dc.source.journal | MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | |
| dc.source.numberofpages | 1 | |
| dc.source.volume | 182 | |
| dc.title | Preface: Advances in semiconductor materials, technology, and applications | |
| dc.type | Editorial material | |
| dspace.entity.type | Publication | |
| Files | ||
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