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Impact of top and bottom conductive lyers on electrical and material properties of ferroelectric aluminum doped HfO2

Date

2016
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dc.contributor.authorFlorent, Karine
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorLavizzari, Simone
dc.contributor.authorDi Piazza, Luca
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorDi Piazza, Luca
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-23T10:51:16Z
dc.date.available2021-10-23T10:51:16Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26626
dc.source.conference47th IEEE Semiconductor Interface Specialists Conference
dc.source.conferencedate8/12/2016
dc.source.conferencelocationSan Diego, CA USA
dc.title

Impact of top and bottom conductive lyers on electrical and material properties of ferroelectric aluminum doped HfO2

dc.typeMeeting abstract
dspace.entity.typePublication
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