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Articles
Dual monopole exposure strategy to improve extreme ultraviolet imaging
Publication:
Dual monopole exposure strategy to improve extreme ultraviolet imaging
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Date
2022
Journal article
https://doi.org/10.1117/1.JMM.21.3.030501
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893.55 KB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Franke, Joern-Holger
;
Brunner, Timothy A.
;
Hendrickx, Eric
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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Downloads
583
since deposited on 2022-10-29
58
last month
10
last week
Acq. date: 2025-12-10
Views
1374
since deposited on 2022-10-29
Acq. date: 2025-12-10
Citations