Publication:
End of Cu roadmap and beyond Cu
Date
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.date.accessioned | 2021-10-23T15:34:56Z | |
| dc.date.available | 2021-10-23T15:34:56Z | |
| dc.date.issued | 2016 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27396 | |
| dc.identifier.url | http://ieeexplore.ieee.org/document/7507738/ | |
| dc.source.conference | IEEE International Interconnect Technology Conference / Advanced Metallization Conference - IITC/AMC | |
| dc.source.conferencedate | 23/05/2016 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | End of Cu roadmap and beyond Cu | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |