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A plasma etch process for bulk finFET manufacturing
Publication:
A plasma etch process for bulk finFET manufacturing
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Shamiryan, Denis
;
Redolfi, Augusto
;
Boullart, Werner
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Views
1890
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2026-08-07
Citations