Effect of pore structure of nanometer scale porous films on the measured elastic modulus

dc.contributor.author	Vanstreels, Kris
dc.contributor.author	Wu, Chen
dc.contributor.author	Gonzalez, Mario
dc.contributor.author	Schneider, Dieter
dc.contributor.author	Gidley, David
dc.contributor.author	Verdonck, Patrick
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.imecauthor	Vanstreels, Kris
dc.contributor.imecauthor	Wu, Chen
dc.contributor.imecauthor	Gonzalez, Mario
dc.contributor.imecauthor	Verdonck, Patrick
dc.contributor.orcidimec	Vanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimec	Wu, Chen::0000-0002-4636-8842
dc.contributor.orcidimec	Verdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned	2021-10-21T13:52:06Z
dc.date.available	2021-10-21T13:52:06Z
dc.date.issued	2013
dc.identifier.issn	0743-7463
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23308
dc.identifier.url	http://pubs.acs.org/doi/abs/10.1021/la402383g?prevSearch=vanstreels&searchHistoryKey=
dc.source.beginpage	12025
dc.source.endpage	12035
dc.source.issue	38
dc.source.journal	Langmuir
dc.source.volume	29
dc.title	Effect of pore structure of nanometer scale porous films on the measured elastic modulus
dc.type	Journal article
dspace.entity.type	Publication
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