Publication:

Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010898
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dc.contributor.authorAlkoken, Ran
dc.contributor.authorBaram, Mor
dc.contributor.authorOron, Gadi
dc.contributor.authorSchuch, Nivea
dc.contributor.authorRobert, Frederic
dc.contributor.authorFigueiro, Thiago
dc.contributor.authorBrand, Omri
dc.contributor.authorGeta, Matan
dc.contributor.authorSaha, Kasturi
dc.contributor.authorMiller, Elias
dc.contributor.authorZavhon, Tal
dc.contributor.authorTiwari, Dipayan
dc.contributor.authorSingh, Deepakkumar
dc.contributor.authorSarkar, Sujan Kumar
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorLorusso, Gian
dc.contributor.authorBeral, Christophe
dc.contributor.authorWei, Chih-I
dc.contributor.authorCurvacho, Gabriel
dc.contributor.authorKim, Young Chang
dc.contributor.imecauthorSarkar, Sujan Kumar
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorBeral, Christophe
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.orcidimecSarkar, Sujan Kumar::0000-0002-8471-6297
dc.contributor.orcidimecLorusso, Gian::0000-0003-3498-5082
dc.contributor.orcidimecBeral, Christophe::0000-0003-1356-9186
dc.date.accessioned2024-08-26T08:42:39Z
dc.date.available2024-06-15T17:25:53Z
dc.date.available2024-08-26T08:42:39Z
dc.date.embargo2024-04-09
dc.date.issued2024
dc.identifier.doi10.1117/12.3010898
dc.identifier.eisbn978-1-5106-7217-8
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44048
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 1295516
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages14
dc.source.volume12955
dc.title

Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

dc.typeProceedings paper
dspace.entity.typePublication
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