Publication:

Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material

Date

2013

Journal article

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Files

26049.pdf 1013.3 KB

Author(s)

Verdonck, Patrick

;

Maheshwari, Abhishek

;

;

;

Franquet, Alexis

;

Loyo Prado, Jana

;

;

Baklanov, Mikhaïl

;

Van Elshocht, Sven

;

;

Roque Huanca, Danilo

;

Gomes dos Santos Filho, Sebastiao

;

Kellerman, Guinther

Journal

ECS Journal of Solid State Science and Technology

Statistics

1892 since deposited on 2021-10-21

Acq. date: 2026-06-22