Publication:

Design of SiGe nano-electromechanical relays for logic applications

Date

2013
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorRochus, Veronique
dc.contributor.authorRamezani, Maliheh
dc.contributor.authorCosemans, Stefan
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorTilmans, Harrie
dc.contributor.authorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorCosemans, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-21T11:27:45Z
dc.date.available2021-10-21T11:27:45Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23004
dc.source.conferenceIEEE Int. Conf on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsyst. - EuroSimE
dc.source.conferencedate15/04/2013
dc.source.conferencelocationWroclaw Poland
dc.title

Design of SiGe nano-electromechanical relays for logic applications

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
26925.pdf
Size:
762.46 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions