Publication:
Recovery of Tungsten from the exhaust stream of a W-CVD tool
Date
| dc.contributor.author | Van Hoornick, Nausikaa | |
| dc.contributor.author | Van Hoeymissen, Jan | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Van Hoornick, Nausikaa | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-01T09:18:36Z | |
| dc.date.available | 2021-10-01T09:18:36Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3049 | |
| dc.source.beginpage | 249 | |
| dc.source.conference | Proceedings of the 1st International Symposium on Environmental Issues in the Electronics/Semiconductor Industries and Electroch | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 263 | |
| dc.title | Recovery of Tungsten from the exhaust stream of a W-CVD tool | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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