Publication:
Impact of surface preparation on the electrical characteristics of scanning spreading resistance microscopy
Date
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Janssens, Tom | |
| dc.contributor.author | Mariolle, D. | |
| dc.contributor.author | Bertin, F. | |
| dc.contributor.author | Chabli, A. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.date.accessioned | 2021-10-16T01:32:44Z | |
| dc.date.available | 2021-10-16T01:32:44Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10443 | |
| dc.source.beginpage | 119 | |
| dc.source.conference | Proceedings of the 8th Int. Workshop on the Fabrication , Characterization and Modeling of Ultra Shallow Junctions in Semicond. | |
| dc.source.conferencedate | 5/06/2005 | |
| dc.source.conferencelocation | Daytona beach, FL USA | |
| dc.title | Impact of surface preparation on the electrical characteristics of scanning spreading resistance microscopy | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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