Publication:

Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoring

Date

2010
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorHalder, Sandip
dc.contributor.authorVos, Rita
dc.contributor.authorWada, Masayuki
dc.contributor.authorClaes, Martine
dc.contributor.authorKenis, Karine
dc.contributor.authorMertens, Paul
dc.contributor.authorDighe, Prasanna
dc.contributor.authorRadovanovic, Sanda
dc.contributor.authorSimpson, Gavin
dc.contributor.authorSonnemans, Roger
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorSimpson, Gavin
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.date.accessioned2021-10-18T16:48:57Z
dc.date.available2021-10-18T16:48:57Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17207
dc.source.beginpage174
dc.source.conference10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS
dc.source.conferencedate19/09/2010
dc.source.conferencelocationOostende Belgium
dc.source.endpage175
dc.title

Using the background signal of a light scattering tool for I/I photo resist strip optimization and monitoring

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
20960.pdf
Size:
542.1 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions