Publication:

Physical characterization of ultrathin high k dielectrics

Date

2003

Proceedings Paper

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Files

7227.pdf 677.71 KB

Author(s)

Vandervorst, Wilfried

;

;

;

Conard, Thierry

;

;

Richard, Olivier

;

Van Elshocht, Sven

;

Delabie, Annelies

;

;

De Gendt, Stefan

Metrics

1826 since deposited on 2021-10-15

Acq. date: 2025-12-16