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Junction depth and active dose extraction from photoelectrothermal modulated optical reflectance (PMOR) power curves

Date

2007
Proceedings Paper
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dc.contributor.authorDortu, Fabian
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.date.accessioned2021-10-16T15:55:19Z
dc.date.available2021-10-16T15:55:19Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12096
dc.source.beginpage95
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
dc.source.conferencedate6/05/2007
dc.source.conferencelocationNapa, CA USA
dc.source.endpage104
dc.title

Junction depth and active dose extraction from photoelectrothermal modulated optical reflectance (PMOR) power curves

dc.typeProceedings paper
dspace.entity.typePublication
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