Publication:

Damascene benchmark of Ru, Co and Cu in scaled dimensions

Date

2018

Proceedings Paper

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Files

38344.pdf 1.67 MB

Author(s)

van der Veen, Marleen

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;

Varela Pedreira, Olalla

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;

Decoster, Stefan

;

Vega Gonzalez, Victor

;

Jourdan, Nicolas

;

Struyf, Herbert

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;

;

Metrics

1958 since deposited on 2021-10-26

1last month

Acq. date: 2026-01-07