Publication:
Preparation and residual stress characterisation of polycrystalline silicon germanium films grown by atmospheric pressure chemical vapour deposition
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1887 since deposited on 2021-09-30
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Acq. date: 2026-08-08
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Statistics
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1887 since deposited on 2021-09-30
2last month
2last week
Acq. date: 2026-08-08
Citations