Publication:

Atomic layer deposition of 2D transition metal dichalogenides

Date

2015-10

Proceedings Paper

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Author(s)

Delabie, Annelies

;

;

Groven, Benjamin

;

;

Haesevoets, Karel

;

Meersschaut, Johan

;

Nuytten, Thomas

;

;

Conard, Thierry

;

Verdonck, Patrick

;

Van Elshocht, Sven

;

;

;

;

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Acq. date: 2026-05-02