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Towards high mobility GeSn channel nMOSFETs: improved surface passivation using novel ozone oxidation method
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1933 since deposited on 2021-10-20
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Acq. date: 2026-04-06
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1933 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-04-06
Citations