Publication:

RMG wet process challenges and the patterning knobs towards N5 and beyond logic devices

Date

2018
Meeting abstract
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Author(s)

Oniki, Yusuke  
;
Ragnarsson, Lars-Ake  
;
Vereecke, Guy  
;
Sebaai, Farid  
;
Dekkers, Harold  
;
Dentoni Litta, Eugenio  
;
Schram, Tom  
;
Holsteyns, Frank  
;
Horiguchi, Naoto  

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2151 since deposited on 2021-10-26
Acq. date: 2026-09-17

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2151 since deposited on 2021-10-26
Acq. date: 2026-09-17

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