Publication:

Raman spectroscopy capabilities for advanced semiconductor technology devices

Date

2024
Journal article
https://doi.org/10.1063/5.0219438
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dc.contributor.authorNuytten, Thomas
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorFleischmann, Claudia
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned2025-06-23T13:54:00Z
dc.date.available2024-08-15T18:46:44Z
dc.date.available2025-06-23T13:54:00Z
dc.date.embargo2024-07-21
dc.date.issued2024
dc.description.wosFundingTextDAS:The data that support the findings of this study are available from the corresponding author upon reasonable request.
dc.identifier.doi10.1063/5.0219438
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44306
dc.publisherAIP Publishing
dc.source.beginpageArt. 053506
dc.source.endpageN/A
dc.source.issue5
dc.source.journalAPPLIED PHYSICS LETTERS
dc.source.numberofpages5
dc.source.volume125
dc.subject.keywordsSTRAIN
dc.title

Raman spectroscopy capabilities for advanced semiconductor technology devices

dc.typeJournal article
dspace.entity.typePublication
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