Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Rapid thermal annealing of electro chemically plated Cu films
Publication:
Rapid thermal annealing of electro chemically plated Cu films
Date
1999
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Beyer, Gerald
;
Kitabijan, P.
;
Brongersma, Sywert
;
Bender, Hugo
;
Richard, Emmanuel
;
Vervoort, Iwan
;
Hey, P.
;
Zhang, P.
;
Maex, Karen
Journal
Abstract
Description
Metrics
Views
1935
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations
Metrics
Views
1935
since deposited on 2021-10-06
Acq. date: 2025-10-23
Citations