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N7 logic via patterning using templated DSA: implementation aspects
Publication:
N7 logic via patterning using templated DSA: implementation aspects
Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bekaert, Joost
;
Doise, Jan
;
Gronheid, Roel
;
Ryckaert, Julien
;
Vandenberghe, Geert
;
Fenger, Germain
;
Her, YoungJun
;
Cao, Yi
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1969
since deposited on 2021-10-22
Acq. date: 2025-10-29
Citations
Metrics
Views
1969
since deposited on 2021-10-22
Acq. date: 2025-10-29
Citations