Browsing imec Publications by author "Zandbergen, Peter"
Now showing items 1-3 of 3
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Characterization and optimization of positive tone DUV resists on TiN substrates
Zandbergen, Peter; Gehoel-van Ansem, W.; Vandenberghe, Geert; Van Driessche, Veerle; Vloeberghs, H. (1997) -
Limits of optical lithography
Maenhoudt, Mireille; Verhaegen, Staf; Ronse, Kurt; Zandbergen, Peter; Muzio, E. (2000) -
Proximity bias swing: origin and characterization
Zandbergen, Peter; Gehoel-van Ansem, Wendy; de Klerk, Jos; Vandenberghe, Geert; Linskens, Frank (2009)