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Understanding oxide degradation mechanisms in ultra-thin SiO2 through high-speed, high-resolution in-situ measurements
Publication:
Understanding oxide degradation mechanisms in ultra-thin SiO2 through high-speed, high-resolution in-situ measurements
Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Aresu, S.
;
De Ceuninck, Ward
;
Degraeve, Robin
;
Kaczer, Ben
;
Knuyt, G.
;
De Schepper, Luc
Journal
Microelectronic Engineering
Abstract
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1923
since deposited on 2021-10-16
Acq. date: 2025-10-27
Citations
Metrics
Views
1923
since deposited on 2021-10-16
Acq. date: 2025-10-27
Citations