A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gate

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Authors

Wang, Qingfeng; Lauwers, A.; Deweerdt, Bruno; Verbeeck, Rita; Loosen, Fred; Maex, Karen

Issue

4

Journal

IEEE Trans. Semiconductor Manufacturing

Volume

8

Title

A manufacturable process to improve thermal stability of 0.25-µm cobalt silicided poly gate

Publication type

Journal article

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