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Conference contributions
Formation of deep submicrometer cobalt silicated poly gate using bilayer processes
Publication:
Formation of deep submicrometer cobalt silicated poly gate using bilayer processes
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Date
1995
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Wang, Qingfeng
;
Lauwers, Anne
;
Deweerdt, Bruno
;
Verbeeck, Rita
;
Maex, Karen
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Abstract
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2003
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
2003
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-11
Citations