dc.contributor.author | Wang, Qingfeng | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Deweerdt, Bruno | |
dc.contributor.author | Verbeeck, Rita | |
dc.contributor.author | Maex, Karen | |
dc.date.accessioned | 2021-09-29T13:25:12Z | |
dc.date.available | 2021-09-29T13:25:12Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1006 | |
dc.source | IIOimport | |
dc.title | Formation of deep submicrometer cobalt silicated poly gate using bilayer processes | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Deweerdt, Bruno | |
dc.contributor.imecauthor | Verbeeck, Rita | |
dc.contributor.imecauthor | Maex, Karen | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 519 | |
dc.source.endpage | 524 | |
dc.source.conference | Proceedings of the 5th International Symposium on Ultra Large Scale Integration Science and Technology | |
dc.source.conferencedate | 21/05/1995 | |
dc.source.conferencelocation | Reno, NV USA | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Proceedings; Vol. 95-5 | |