Authors

Bearda, Twan; Vandermot, Ief; Van den Broeck, Kristel; Van Hoornick, Nausikaa; Van Hoeymissen, Jan; Mertens, Paul

Conference

Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium

Title

Metal contamination on silicon surfaces from solvents

Publication type

Proceedings paper