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Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations
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Authors
Bennett, Marylyn Hoy
;
Grenville, Andrew
;
Hector, Scott
;
Palmer, Shane
;
Leunissen, Peter
;
Philipsen, Vicky
;
Bloomstein, Theodore
;
Hardy, Denis E.
;
Rothschild, Mordechai
;
Hilfiker, James N.
Conference
Optical Microlithography XVIII
Title
Experimental measurements of diffraction for periodic patterns by 193-nm polarized radiation compared to rigorous EMF simulations
Publication type
Proceedings paper
Embargo date
9999-12-31
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