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Reliability of Porous Dielectrics

dc.contributor.authorBeyer, Gerald
dc.contributor.authorSchaekers, Marc
dc.date.accessioned2021-10-16T00:46:07Z
dc.date.available2021-10-16T00:46:07Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10096
dc.sourceIIOimport
dc.titleReliability of Porous Dielectrics
dc.typeOral presentation
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewno
dc.source.conferenceSemicon Europe
dc.source.conferencedate12/04/2005
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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