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Growth kinetics of germanium on (100) germanium by pyrolysis of germane

dc.contributor.authorBonzom, Renaud
dc.contributor.authorLeys, Frederik
dc.contributor.authorLoo, Roger
dc.contributor.authorDessein, Kristof
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-16T00:48:21Z
dc.date.available2021-10-16T00:48:21Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10128
dc.sourceIIOimport
dc.titleGrowth kinetics of germanium on (100) germanium by pyrolysis of germane
dc.typeOral presentation
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceMRS 2005 Spring Meeting Symposium P: In situ Studies of Gas/Solid Surface Reaction Dynamics
dc.source.conferencedate28/03/2005
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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