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Comparative reliability investigation of different nitride based local charge trapping memory devices
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Authors
Breuil, Laurent
;
Haspeslagh, Luc
;
Blomme, Pieter
;
Lorenzini, Martino
;
Wellekens, Dirk
;
De Vos, Joeri
;
Van Houdt, Jan
Conference
Proceedings 43rd Annual International Reliability Physics Symposium
Title
Comparative reliability investigation of different nitride based local charge trapping memory devices
Publication type
Proceedings paper
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