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The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD

dc.contributor.authorBrijs, Bert
dc.contributor.authorGiangrandi, Simone
dc.contributor.authorArstila, K.
dc.contributor.authorBergmaier, A.
dc.contributor.authorKimura, K.
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-16T00:50:30Z
dc.date.available2021-10-16T00:50:30Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10154
dc.sourceIIOimport
dc.titleThe analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conference17th International Conference on Ion Beam Analysis
dc.source.conferencedate26/06/2005
dc.source.conferencelocationSevilla Spain
imec.availabilityPublished - imec


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