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Evaluation of gas cluster ion beam processing for sealing af a porous dielectric

dc.contributor.authorBrongersma, Sywert
dc.contributor.authorSherman, S.
dc.contributor.authorTabat, M.
dc.contributor.authorPatz, Michael
dc.contributor.authorBeyer, Gerald
dc.contributor.authorTravaly, Youssef
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorHautala, J.
dc.date.accessioned2021-10-16T00:51:16Z
dc.date.available2021-10-16T00:51:16Z
dc.date.issued2005-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10163
dc.sourceIIOimport
dc.titleEvaluation of gas cluster ion beam processing for sealing af a porous dielectric
dc.typeProceedings paper
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage463
dc.source.endpage468
dc.source.conferenceAdvanced Metallization Conference 2004
dc.source.conferencedate19/10/2004
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XX


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