Growth of strained Si on He ion implanted Si/SiGe heterostructures

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Authors
Buca, D.; Feste, S.; Hollander, B.; Mantl, S.; Loo, Roger; Caymax, Matty; Carius, R.; Schaefer, H.
Conference
6th European Conference on Integration in Silicon - ULIS
Title
Growth of strained Si on He ion implanted Si/SiGe heterostructures
Publication type
Proceedings paper
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