Authors

Camillo-Castillo, Renata; Law, M.E.; Lindsay, Richard; Maex, Karen; Pawlak, Bartek; McCoy, S.

Conference

8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors

Title

Effect of varying the initial conditions prior to flash-assist rapid thermal processing on dopant activation, diffusion, and defect populations

Publication type

Oral presentation